ΒΆ Resistance evaporator
| Location | Evaporator Lab (HL605) |
|---|---|
| Functions | Evaporation, sample heating, sample cooling |
| Specimen | 3 inch wafer or smaller |
| Deposition materials | Au, Ag, Cr |
| Manufacturer | In-house + TSP |
| Responsible | Sander van Leeuwen Luc Wigbout |
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