ΒΆ Z406 & Z407 RF Diode sputtering machine
| Location | Sputtering Lab (HL603) |
|---|---|
| Functions | Diode sputtering system |
| Specimen | Several ~ 15x15 mm samples, standard wafer thickness |
| Manufacturer | Leybold-Heraeus & TSP |
| Useful files | Target planning |
| Responsible | Sander van Leeuwen |
Soon more.