ΒΆ Polos SPIN 150i/200i
| Location | Cleanroom (HL612) |
|---|---|
| Functions | Spin coating |
| Specimen | ~ 15x15 mm samples, standard wafer thickness |
| Manufacturer | SPS |
| Useful files | - Operation instructions - Quick reference guide. |
| Responsible | Luc Wigbout |
| Location | Cleanroom (HL612) |
|---|---|
| Functions | Spin coating |
| Specimen | ~ 15x15 mm samples, standard wafer thickness |
| Manufacturer | SPS |
| Useful files | - Operation instructions - Quick reference guide. |
| Responsible | Luc Wigbout |