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POLOS Spin 150i
Location
Cleanroom (HL612)
Functions
Spincoating of photo- and e-beam resists
Specimen
ranging from ~15x15 mm samples to 4 inch wafers
Manufacturer
SPS
Responsible
Luc Wigbout
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What is spin coating
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Spin curves
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Data sheets for resists
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Manual
Quick reference guide
How to operate the spincoater.
