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Niobium titanuim nitride (NbTiN)
Synonyms
Niobium titanium nitride, NbTiN, Nb
y
Ti
1-y
N
x
Uses
...
Hazards
Deposition techniques
Reactive sputtering
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Niobium nitride (NbN)
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Common uses
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Recipes
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Sputtering (
ATC
)
Make sure to first read the following papers:
The model of Berg & Nyberg
That one from David Thoen