¶ Silicon Oxide (SiOx)
| Synonyms | Silicon oxide; if x=2 silicondioxide or quartz; if x=1 siliconmonoxide) |
|---|---|
| Uses | Capping, substrates, ... |
| Hazards | |
| Deposition techniques | Sputtering |
| Synonyms | Silicon oxide; if x=2 silicondioxide or quartz; if x=1 siliconmonoxide) |
|---|---|
| Uses | Capping, substrates, ... |
| Hazards | |
| Deposition techniques | Sputtering |
